JPS62199188U - - Google Patents
Info
- Publication number
- JPS62199188U JPS62199188U JP8908386U JP8908386U JPS62199188U JP S62199188 U JPS62199188 U JP S62199188U JP 8908386 U JP8908386 U JP 8908386U JP 8908386 U JP8908386 U JP 8908386U JP S62199188 U JPS62199188 U JP S62199188U
- Authority
- JP
- Japan
- Prior art keywords
- mounting table
- cleaning device
- cleaning
- control circuit
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8908386U JPH039824Y2 (en]) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8908386U JPH039824Y2 (en]) | 1986-06-10 | 1986-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62199188U true JPS62199188U (en]) | 1987-12-18 |
| JPH039824Y2 JPH039824Y2 (en]) | 1991-03-12 |
Family
ID=30947745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8908386U Expired JPH039824Y2 (en]) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH039824Y2 (en]) |
-
1986
- 1986-06-10 JP JP8908386U patent/JPH039824Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039824Y2 (en]) | 1991-03-12 |